Description
The PureAire Universal Dichlorosilane (SiH2Cl2) Gas Detector is a fixed gas monitoring system designed for continuous detection of dichlorosilane in semiconductor manufacturing, cleanrooms, chemical vapor deposition (CVD) processes, photovoltaic manufacturing, and other applications where SiH2Cl2 may be present.
This configuration monitors dichlorosilane from 0–15 ppm and uses PureAire's renewable electrochemical sensor technology for continuous, real-time gas monitoring.
The monitor features a backlit digital display, built-in audible horn, visual alarm LEDs, dual-level user-adjustable alarm relays, and an active 4–20 mA output for connection to PLCs, SCADA systems, remote alarms, ventilation equipment, and other facility safety systems.
The smart renewable sensor stores its gas type, measurement range, and calibration information. PureAire's renewable sensor design allows the sensor to be serviced and recharged with fresh electrolyte rather than routinely replacing the complete sensor cell.
Gas: Dichlorosilane (SiH2Cl2)
Detection Range: 0–15 ppm
PureAire Part Number: 90241
Monitor Platform: PureAire Universal Gas Detector
- Continuous dichlorosilane (SiH2Cl2) monitoring
- 0–15 ppm detection range
- Renewable electrochemical self-checking sensor
- Built-in microprocessor in sensor
- Plug-and-play sensor configuration
- Backlit digital gas concentration display
- Built-in audible horn
- Visual alarm LEDs
- Dual-level user-adjustable alarm relays
- Active 4–20 mA analog output
- Continuous sensor and system status monitoring
- Connects to PLC or SCADA systems
- Optional remote sensor installation up to 30 ft from transmitter
- Designed for continuous fixed gas monitoring
- UL, CUL, and CE approvals
- 24 VDC power supply included
Typical Applications
- Semiconductor manufacturing
- Semiconductor fabrication facilities
- Cleanrooms
- Chemical vapor deposition (CVD) processes
- Thin-film deposition
- Photovoltaic and solar-cell manufacturing
- Specialty-gas handling areas
- Gas cabinets and gas distribution systems
- Research and development facilities
- Toxic and corrosive gas monitoring
| Manufacturer | PureAire Monitoring Systems |
| Product Family | Universal Gas Detector |
| PureAire Part Number | 90241 |
| Gas Detected | Dichlorosilane (SiH2Cl2) |
| Detection Range | 0–15 ppm |
| Sampling Method | Diffusion |
| Accuracy | ±10% of full scale |
| Sensor Type | Renewable electrochemical self-checking sensor with built-in microprocessor |
| Sensor Life | 3–8 years under normal conditions |
| Display | Backlit LCD digital display |
| Display Information | Gas name, ppm concentration, AL1, AL2 and system fault messages |
| Signal Output | Active 4–20 mA analog output |
| Alarm Relays | Dual-level alarm relay contacts |
| Power | 24 VDC |
| Operating Temperature | -25°F to 122°F (-32°C to 50°C) |
| Dimensions | 5.12 in W × 8.25 in H × 3.20 in D |
| Weight | 1.2 lb (19.2 oz) |
| Enclosure | Polycarbonate UL-listed general-purpose enclosure |
| Remote Sensor Option | Available up to 30 ft from transmitter |
| Country of Origin | USA |
Specifications are subject to manufacturer updates. Refer to the current PureAire Universal Gas Detector instruction manual for complete installation, operation, calibration, safety, and maintenance requirements.
Product Literature
Instruction Manuals
- PureAire Universal Gas Detector Instruction Manual – Rev. 4.18
- PureAire Universal Gas Detector Instruction Manual – Rev. 4.17
Sensor & Startup Information
- Universal Electrochemical Cell Post-Shipping Startup Instructions
- PureAire Renewable vs. Disposable Sensor Comparison
Additional Product Literature
Need help with the PureAire Dichlorosilane Gas Detector, installation, calibration, or system integration? Call CPS Calibrations at 865-900-8844 or email info@cpscalibrations.com.