PureAire
PureAire Universal Tri-Chlorosilane (SiHCl3) Gas Detector – 0-15 ppm
- SKU:
- 90230
Description
The PureAire Universal Tri-Chlorosilane (SiHCl3) Gas Detector is a fixed gas monitoring system designed for continuous tri-chlorosilane detection in polysilicon production, semiconductor manufacturing, solar manufacturing, chemical processing, and other locations where trichlorosilane vapor may be present.
This Tri-Chlorosilane Gas Detector is available in 0–15 ppm detection ranges, allowing the appropriate measurement range to be selected for the application. The PureAire Universal Gas Detector provides continuous, real-time tri-chlorosilane monitoring for facility and personnel safety applications.
The monitor features a local digital display, built-in audible alarm, visual alarm indicators, two adjustable alarm relays, and an active 4–20 mA output for integration with PLCs, facility monitoring systems, ventilation equipment, remote alarms, and other safety systems.
Because tri-chlorosilane can present a hazard at elevated concentrations, continuous fixed monitoring with local alarms and 4–20 mA integration can provide early warning as concentrations increase.
Gas: Tri-Chlorosilane (SiHCl3)
Available Detection Ranges: 0–15 ppm
Monitor Platform: PureAire Universal Gas Detector
- Continuous tri-chlorosilane (SiHCl3) gas monitoring
- 0–15 ppm detection ranges available
- Local digital concentration display
- Built-in audible alarm
- Visual alarm indicators
- Two user-adjustable alarm relay setpoints
- Active 4–20 mA analog output
- Designed for continuous fixed gas monitoring
- Compatible with PLC and facility monitoring systems
- Remote sensor configurations available
- Remote sensor cable lengths available up to 30 ft
- 24 VDC operation
- Wall-mount design
Available Tri-Chlorosilane Ranges
| Detection Range | PureAire Part Number |
| 0–15 ppm SiHCl3 | 90230 |
Tri-Chlorosilane Safety Monitoring
Trichlorosilane is a corrosive, moisture-reactive gas that is heavier than air. Continuous fixed monitoring provides early warning of releases for personnel and facility safety.
System Integration
The active 4–20 mA output and adjustable alarm relays allow the detector to interface with PLCs, ventilation equipment, external horns and strobes, remote displays, and other facility safety systems when properly configured.
| Manufacturer | PureAire Monitoring Systems |
| Product Family | Universal Gas Detector |
| Gas Detected | Tri-Chlorosilane (SiHCl3) |
| Available Ranges | 0–15 ppm |
| Part Numbers | 90230 (0–15 ppm) |
| Display | Digital concentration display |
| Analog Output | Active 4–20 mA |
| Alarm Relays | Two user-adjustable alarm relays |
| Alarm Indication | Audible and visual alarm indication |
| Power Requirement | 24 VDC regulated |
| Remote Sensor Option | Available; remote cable lengths up to 30 ft |
| Approximate Unit Weight | 1.2 lb (19.2 oz) |
The PureAire Universal Tri-Chlorosilane Gas Detector is designed for continuous SiHCl3 monitoring in areas where tri-chlorosilane is used, stored, handled, or may be released.
Typical Applications
- Polysilicon production
- Semiconductor manufacturing
- Solar manufacturing
- Chemical processing facilities
- Gas cabinets and distribution systems
- Laboratories and research facilities
- Industrial manufacturing
- Workplace safety monitoring
Because trichlorosilane vapor is heavier than air, detector placement should account for potential accumulation in low-lying areas. Final detector location, alarm settings, ventilation requirements, and system integration should be based on the specific application and applicable safety requirements.
Product Literature
Instruction Manuals
- PureAire Universal Gas Detector Instruction Manual – Rev. 4.18
- PureAire Universal Gas Detector Instruction Manual – Rev. 4.17
Sensor & Startup Information
- Universal Electrochemical Cell Post-Shipping Startup Instructions
- PureAire Renewable vs. Disposable Sensor Comparison
Additional Product Literature
Need help selecting the correct PureAire Tri-Chlorosilane Gas Detector range, installation, calibration, or system integration? Call CPS Calibrations at 865-900-8844 or email info@cpscalibrations.com.